# Optical constants for Ru created by PTB # Reconstructed from reflection measurements in the wavelength range 8.0 - 23.75 nm # 50 nm Ru thin film on Si (measured 12/2020) # n = (1-delta) - (i*beta) # The values are provided with their 3-sigma uncertainty bounds. HB: Higher Bound. LB: Lower Bound. #lambda/nm 1-delta beta 1-delta_LB 1-delta_HB beta_LB beta_HB # ------------------------ 8.0 0.97386 0.00487 0.97378 0.97393 0.00478 0.00495 8.25 0.97185 0.0048 0.97177 0.97193 0.00474 0.00486 8.5 0.9697 0.00496 0.96962 0.96978 0.00489 0.00503 8.75 0.96751 0.00497 0.96742 0.96759 0.0049 0.00503 9.0 0.9652 0.00505 0.96512 0.96529 0.00499 0.00511 9.25 0.9627 0.00512 0.96261 0.96279 0.00505 0.0052 9.5 0.96014 0.00514 0.96005 0.96023 0.00509 0.00519 9.75 0.95736 0.00525 0.95726 0.95746 0.00518 0.00532 10.0 0.9545 0.00524 0.9544 0.9546 0.00518 0.0053 10.25 0.95149 0.00519 0.95139 0.95159 0.00513 0.00525 10.5 0.94822 0.00514 0.94812 0.94833 0.00508 0.0052 10.75 0.94468 0.00523 0.94457 0.94478 0.00518 0.00528 11.0 0.9409 0.00524 0.94079 0.94102 0.00518 0.00531 11.25 0.9368 0.00541 0.93669 0.93691 0.00535 0.00546 11.5 0.93263 0.00632 0.93251 0.93275 0.00624 0.00639 11.75 0.92835 0.00625 0.92822 0.92846 0.00619 0.00631 12.0 0.92342 0.00682 0.92329 0.92356 0.00674 0.0069 12.25 0.91833 0.0076 0.9182 0.91845 0.00752 0.00768 12.5 0.91301 0.00859 0.91287 0.91315 0.00852 0.00867 12.75 0.90745 0.00979 0.90731 0.90759 0.00969 0.00989 13.0 0.90151 0.01129 0.90136 0.90166 0.01119 0.0114 13.25 0.89531 0.01322 0.89515 0.89547 0.01309 0.01335 13.5 0.88889 0.01557 0.88872 0.88906 0.01542 0.01572 13.75 0.8822 0.0184 0.88201 0.88239 0.01822 0.01858 14.0 0.87539 0.02173 0.87518 0.87559 0.02152 0.02195 14.25 0.86859 0.02564 0.86837 0.86881 0.02539 0.02588 14.5 0.86178 0.03013 0.86154 0.86201 0.02984 0.03042 14.75 0.85525 0.03515 0.855 0.8555 0.03482 0.03547 15.0 0.84883 0.04045 0.84856 0.84909 0.04009 0.04082 15.25 0.84248 0.04625 0.84219 0.84277 0.04585 0.04667 15.5 0.83613 0.05252 0.83582 0.83645 0.05207 0.05298 15.75 0.82987 0.05929 0.82954 0.8302 0.05879 0.05977 16.0 0.8237 0.06674 0.82335 0.82405 0.06621 0.06727 16.25 0.81779 0.07505 0.81742 0.81816 0.07449 0.07562 16.5 0.8124 0.08403 0.81201 0.8128 0.08343 0.08462 16.75 0.80771 0.09347 0.80729 0.80813 0.09282 0.09412 17.0 0.80368 0.10336 0.80322 0.80415 0.10265 0.10406 17.25 0.8001 0.11393 0.79958 0.80063 0.11317 0.11468 17.5 0.79738 0.12467 0.79681 0.79797 0.12387 0.12547 17.75 0.79577 0.13506 0.79514 0.7964 0.13421 0.13593 18.0 0.79491 0.14605 0.79422 0.79562 0.14516 0.14696 18.25 0.79499 0.15705 0.79422 0.79576 0.15607 0.15803 18.5 0.79632 0.16772 0.79548 0.79718 0.1667 0.16874 18.75 0.79842 0.17765 0.79751 0.79936 0.17656 0.17876 19.0 0.80113 0.18692 0.80013 0.80216 0.18575 0.18807 19.25 0.80446 0.19554 0.80338 0.80556 0.19432 0.19676 19.5 0.80773 0.2031 0.80658 0.80889 0.20183 0.20437 19.75 0.81073 0.20966 0.8095 0.81199 0.20833 0.21099 20.0 0.81372 0.21633 0.8124 0.81503 0.21495 0.21771 20.25 0.81602 0.22285 0.81465 0.8174 0.22142 0.2243 20.5 0.81821 0.22966 0.81678 0.81967 0.22817 0.23115 20.75 0.82097 0.23676 0.81944 0.8225 0.23519 0.23831 21.0 0.82365 0.24347 0.82206 0.82529 0.24185 0.2451 21.25 0.82746 0.25047 0.82576 0.8292 0.24879 0.25214 21.5 0.83153 0.25781 0.82974 0.83338 0.25607 0.25955 21.75 0.8362 0.26484 0.83425 0.83818 0.26303 0.26667 22.0 0.84168 0.27114 0.83964 0.84376 0.26926 0.27303 22.25 0.84697 0.2763 0.84478 0.84917 0.27433 0.27826 22.5 0.85355 0.2811 0.85123 0.85588 0.27909 0.28313 22.75 0.8601 0.28411 0.85771 0.86255 0.28207 0.28617 23.0 0.86582 0.28684 0.86326 0.86844 0.28472 0.28898 23.25 0.87024 0.28913 0.86756 0.873 0.28694 0.29137 23.5 0.87383 0.29136 0.87095 0.87675 0.2891 0.29367 23.75 0.87676 0.29364 0.87374 0.87991 0.29126 0.29603