# Optical constants for SiN created by PTB
# Reconstructed from reflection measurements in the wavelength range 5.0 - 33.0 nm
# 40 nm SiN thin film on Si  (measured 2024)
# n = (1-delta) - (i*beta)
# Citation: Q. Saadeh, V. Philipsen, J. Meersschaut, V. S. K. Channam, K.-A. Kantre, A. Sokolov, B. Kupper, T. Wiesner, D. O. García, Z. Salami, C. Buchholz, F. Scholze, and V. Soltwisch, "Optical constants of TiN, amorphous SiO2, and SiN in the extreme ultraviolet range," Appl. Opt. 63(36), 9210-9222 (2024).
# The values are provided with their 3-sigma uncertainty bounds. HB: Higher Bound. LB: Lower Bound.
#lambda/nm	1-delta	beta	1-delta_LB	1-delta_HB	beta_LB	beta_HB
# ------------------------
5.0	0.99378	0.00331	0.99389	0.99367	0.00312	0.00351
5.2	0.99337	0.00359	0.99349	0.99324	0.0034	0.00379
5.4	0.99296	0.00393	0.99309	0.99282	0.00374	0.00415
5.6	0.99256	0.00434	0.9927	0.99241	0.00413	0.00456
5.8	0.99222	0.00478	0.99238	0.99207	0.00456	0.00502
6.0	0.99195	0.00521	0.99213	0.99178	0.00497	0.00543
6.2	0.99168	0.00556	0.99186	0.99149	0.00533	0.00581
6.4	0.99138	0.00591	0.99157	0.99118	0.00566	0.00617
6.6	0.99103	0.00635	0.99123	0.99083	0.00608	0.00661
6.8	0.99073	0.00696	0.99094	0.99051	0.00669	0.00723
7.0	0.99048	0.0076	0.99073	0.99024	0.00734	0.00788
7.1	0.99061	0.0077	0.99087	0.99036	0.00751	0.00792
7.11	0.9906	0.00772	0.99085	0.99035	0.00752	0.00793
7.12	0.99061	0.00775	0.99086	0.99034	0.00756	0.00796
7.13	0.9906	0.00778	0.99084	0.99034	0.00757	0.00798
7.14	0.99063	0.00783	0.99088	0.99038	0.00763	0.00803
7.15	0.99064	0.00786	0.99088	0.99038	0.00765	0.00807
7.16	0.99065	0.0079	0.99092	0.9904	0.0077	0.00811
7.17	0.99067	0.00793	0.99092	0.99041	0.00774	0.00814
7.18	0.99066	0.00795	0.99091	0.99042	0.00775	0.00816
7.19	0.99067	0.00797	0.99091	0.9904	0.00777	0.00817
7.2	0.99066	0.00798	0.99092	0.99041	0.00778	0.00819
7.21	0.99068	0.00804	0.99094	0.99043	0.00784	0.00825
7.22	0.99066	0.00806	0.9909	0.9904	0.00785	0.00828
7.23	0.99068	0.00808	0.99094	0.99043	0.00788	0.00829
7.24	0.99069	0.00812	0.99093	0.99042	0.00792	0.00833
7.25	0.99069	0.00812	0.99093	0.99043	0.00792	0.00832
7.26	0.9907	0.00817	0.99096	0.99046	0.00797	0.00839
7.27	0.99071	0.0082	0.99097	0.99046	0.008	0.00841
7.28	0.99075	0.00822	0.99099	0.9905	0.00803	0.00843
7.29	0.99078	0.00833	0.99104	0.99053	0.00812	0.00854
7.3	0.99072	0.00826	0.99098	0.99047	0.00805	0.00846
7.31	0.99071	0.00827	0.99097	0.99046	0.00807	0.00848
7.32	0.99072	0.00829	0.99096	0.99047	0.00809	0.0085
7.33	0.99071	0.00831	0.99098	0.99045	0.0081	0.00852
7.34	0.99071	0.00833	0.99096	0.99047	0.00812	0.00854
7.35	0.99073	0.00836	0.99098	0.99049	0.00816	0.00858
7.36	0.99073	0.00837	0.99099	0.9905	0.00817	0.00858
7.37	0.9907	0.00838	0.99095	0.99046	0.00819	0.00858
7.38	0.99071	0.0084	0.99095	0.99046	0.0082	0.00861
7.39	0.99071	0.00842	0.99096	0.99047	0.00822	0.00864
7.4	0.99072	0.00843	0.99096	0.99047	0.00823	0.00864
7.41	0.99072	0.00847	0.99095	0.99047	0.00827	0.00868
7.42	0.9907	0.00846	0.99094	0.99046	0.00825	0.00866
7.43	0.99068	0.00847	0.99092	0.99043	0.00827	0.00868
7.44	0.99066	0.0085	0.99091	0.99041	0.0083	0.00871
7.45	0.99066	0.00851	0.99092	0.99042	0.00831	0.00872
7.46	0.99064	0.00852	0.99089	0.99039	0.00832	0.00873
7.47	0.99064	0.00857	0.99088	0.9904	0.00837	0.00877
7.48	0.99062	0.00856	0.99086	0.99038	0.00835	0.00878
7.49	0.99063	0.00859	0.99088	0.99038	0.00838	0.00879
7.5	0.99062	0.00862	0.99087	0.99037	0.00841	0.00883
7.51	0.99058	0.0086	0.99083	0.99034	0.00839	0.00881
7.52	0.99059	0.00863	0.99084	0.99035	0.00842	0.00884
7.53	0.99057	0.00865	0.99082	0.99032	0.00844	0.00886
7.54	0.99058	0.0087	0.99082	0.99034	0.00849	0.00892
7.55	0.99055	0.00867	0.99079	0.99031	0.00846	0.00888
7.56	0.99053	0.0087	0.99078	0.9903	0.00849	0.00891
7.57	0.99054	0.00873	0.99079	0.99029	0.00853	0.00895
7.58	0.99052	0.00874	0.99077	0.99027	0.00853	0.00895
7.59	0.99049	0.00876	0.99073	0.99023	0.00855	0.00899
7.6	0.99047	0.00878	0.99072	0.99022	0.00857	0.009
7.61	0.99043	0.00879	0.99067	0.99018	0.00858	0.00901
7.62	0.99043	0.00882	0.99069	0.99018	0.00861	0.00904
7.63	0.9904	0.00885	0.99064	0.99014	0.00864	0.00907
7.64	0.99039	0.00889	0.99064	0.99014	0.00869	0.00911
7.65	0.99035	0.00891	0.99059	0.99009	0.00869	0.00912
7.66	0.99032	0.00895	0.99059	0.99007	0.00873	0.00918
7.67	0.99029	0.009	0.99055	0.99004	0.00878	0.00921
7.68	0.99028	0.00904	0.99053	0.99003	0.00882	0.00926
7.69	0.99027	0.00909	0.99053	0.99003	0.00889	0.00931
7.7	0.99025	0.00914	0.99051	0.98998	0.00892	0.00938
7.71	0.99024	0.00923	0.99051	0.98998	0.00902	0.00945
7.72	0.99025	0.00931	0.99052	0.98998	0.0091	0.00953
7.73	0.99027	0.00938	0.99053	0.99001	0.00916	0.00962
7.74	0.99031	0.00946	0.99059	0.99005	0.00924	0.00969
7.75	0.99036	0.00953	0.99064	0.9901	0.0093	0.00976
7.76	0.99042	0.00957	0.9907	0.99015	0.00934	0.00982
7.77	0.9905	0.0096	0.99077	0.99022	0.00938	0.00982
7.78	0.99056	0.00958	0.99083	0.9903	0.00935	0.00981
7.79	0.99061	0.00949	0.99088	0.99035	0.00927	0.00972
7.8	0.99063	0.00935	0.99091	0.99036	0.00913	0.00958
7.81	0.9906	0.0092	0.99087	0.99034	0.00898	0.00943
7.82	0.99056	0.00902	0.99082	0.99031	0.00879	0.00924
7.83	0.99049	0.00887	0.99075	0.99024	0.00866	0.0091
7.84	0.99038	0.0087	0.99064	0.99012	0.00849	0.00892
7.85	0.99024	0.00861	0.99051	0.98998	0.00841	0.00882
7.86	0.99012	0.00856	0.99038	0.98986	0.00835	0.00877
7.87	0.98999	0.00854	0.99025	0.98972	0.00834	0.00875
7.88	0.98995	0.0086	0.9902	0.98969	0.00839	0.00882
7.89	0.98985	0.00863	0.99013	0.98958	0.00843	0.00885
7.9	0.98978	0.00867	0.99006	0.98951	0.00846	0.00889
7.91	0.98974	0.00872	0.99001	0.98946	0.00851	0.00893
7.92	0.98973	0.00879	0.99001	0.98946	0.00857	0.00901
7.93	0.98974	0.00888	0.99002	0.98946	0.00867	0.00911
7.94	0.98974	0.00894	0.99002	0.98945	0.00873	0.00916
7.95	0.98977	0.00898	0.99006	0.98949	0.00877	0.0092
7.96	0.9898	0.00904	0.99009	0.98951	0.00883	0.00927
7.97	0.98986	0.0091	0.99016	0.98958	0.00889	0.00931
7.98	0.98995	0.00916	0.99023	0.98967	0.00895	0.00938
7.99	0.98997	0.00915	0.99027	0.98967	0.00893	0.00937
8.0	0.99002	0.00918	0.99032	0.98971	0.00897	0.00941
8.01	0.99007	0.00922	0.99037	0.98978	0.00901	0.00944
8.02	0.99013	0.0092	0.99043	0.98984	0.00899	0.00943
8.03	0.99013	0.00919	0.99043	0.98983	0.00899	0.0094
8.04	0.99014	0.00921	0.99042	0.98986	0.00899	0.00943
8.05	0.99016	0.00922	0.99044	0.98987	0.00901	0.00945
8.06	0.99013	0.0092	0.99042	0.98985	0.00899	0.00942
8.07	0.99013	0.0092	0.99041	0.98984	0.00899	0.00942
8.08	0.99009	0.00919	0.99038	0.98981	0.00898	0.00942
8.09	0.99006	0.00924	0.99033	0.98978	0.00903	0.00946
8.1	0.99006	0.00921	0.99034	0.9898	0.00899	0.00942
8.11	0.99003	0.00922	0.99031	0.98976	0.009	0.00944
8.12	0.99003	0.00924	0.9903	0.98976	0.00902	0.00946
8.13	0.98999	0.00925	0.99026	0.98973	0.00903	0.00947
8.14	0.98997	0.00928	0.99023	0.9897	0.00907	0.0095
8.15	0.98996	0.00932	0.99023	0.98969	0.00911	0.00955
8.2	0.9897	0.01003	0.98999	0.98941	0.00975	0.01031
8.3	0.98946	0.01031	0.98977	0.98916	0.01003	0.01063
8.4	0.98925	0.01064	0.98956	0.98896	0.01035	0.01095
8.5	0.98908	0.01099	0.98939	0.98876	0.01069	0.01131
8.6	0.98894	0.01138	0.98927	0.98862	0.01106	0.01171
8.7	0.98885	0.01178	0.98919	0.98852	0.01147	0.01211
8.8	0.98885	0.01221	0.9892	0.98851	0.01188	0.01256
8.9	0.98888	0.01258	0.98925	0.98855	0.01225	0.01292
9.0	0.98898	0.01289	0.98934	0.9886	0.01255	0.01322
9.1	0.98914	0.01314	0.98954	0.98875	0.0128	0.01349
9.2	0.98938	0.01335	0.98977	0.989	0.013	0.01368
9.3	0.98964	0.01346	0.99004	0.98924	0.01313	0.01381
9.4	0.98991	0.01348	0.99028	0.98951	0.01314	0.01382
9.5	0.99018	0.01344	0.99058	0.98979	0.01313	0.01376
9.6	0.99051	0.01341	0.9909	0.99011	0.0131	0.01374
9.7	0.99084	0.01336	0.99124	0.99045	0.01305	0.01369
9.8	0.99126	0.0133	0.99169	0.99084	0.01298	0.01361
9.9	0.99173	0.01315	0.99215	0.99133	0.01284	0.01346
10.0	0.99196	0.01273	0.99249	0.99141	0.01236	0.01314
10.1	0.99231	0.01251	0.99282	0.9918	0.01215	0.01288
10.2	0.99247	0.01237	0.99296	0.99199	0.01202	0.01274
10.3	0.99241	0.01231	0.99287	0.99194	0.01197	0.01267
10.4	0.99229	0.01233	0.99273	0.99187	0.01199	0.01271
10.5	0.99208	0.01235	0.99249	0.9917	0.01201	0.01273
10.6	0.99191	0.01225	0.99231	0.99153	0.01187	0.01265
10.7	0.99174	0.01182	0.99211	0.99138	0.01147	0.01218
10.8	0.9915	0.01113	0.99185	0.99116	0.01082	0.01146
10.9	0.99092	0.0105	0.99125	0.99059	0.0102	0.01083
11.0	0.99032	0.01058	0.99063	0.98998	0.01027	0.01093
11.1	0.99015	0.00998	0.9904	0.98991	0.00977	0.01019
11.11	0.99026	0.01013	0.99052	0.99001	0.00992	0.01034
11.12	0.99028	0.01024	0.99054	0.99004	0.01002	0.01045
11.13	0.99023	0.01038	0.99047	0.98998	0.01016	0.01062
11.14	0.99014	0.01042	0.99039	0.98988	0.0102	0.01065
11.15	0.99005	0.01043	0.99031	0.9898	0.01022	0.01065
11.16	0.99001	0.01049	0.99026	0.98975	0.01027	0.01072
11.17	0.98992	0.01052	0.99018	0.98967	0.0103	0.01077
11.18	0.98985	0.01058	0.9901	0.98959	0.01036	0.0108
11.19	0.98979	0.01059	0.99004	0.98952	0.01037	0.01082
11.2	0.98971	0.01064	0.98997	0.98944	0.01042	0.01087
11.21	0.98967	0.01076	0.98992	0.98941	0.01054	0.01099
11.22	0.9896	0.01081	0.98988	0.98934	0.01059	0.01104
11.23	0.98947	0.01089	0.98973	0.98919	0.01066	0.01113
11.24	0.98949	0.01106	0.98975	0.98923	0.01082	0.01129
11.25	0.98939	0.01112	0.98967	0.98912	0.01089	0.01136
11.26	0.98933	0.01125	0.98961	0.98905	0.01101	0.0115
11.27	0.98936	0.01144	0.98965	0.98906	0.0112	0.01168
11.28	0.98929	0.01159	0.98958	0.98899	0.01135	0.01184
11.29	0.98931	0.01178	0.98962	0.98902	0.01154	0.01203
11.3	0.98935	0.01198	0.98966	0.98902	0.01173	0.01224
11.31	0.98939	0.01221	0.98972	0.98907	0.01194	0.01246
11.32	0.98954	0.01245	0.98986	0.98921	0.0122	0.01275
11.33	0.98968	0.01265	0.99002	0.98936	0.01238	0.01292
11.34	0.98979	0.01284	0.99015	0.98944	0.01258	0.01312
11.35	0.98998	0.01305	0.99033	0.98962	0.01277	0.01333
11.36	0.99024	0.0132	0.99061	0.98987	0.01293	0.01348
11.37	0.9905	0.01339	0.99085	0.99011	0.01312	0.01369
11.38	0.99072	0.01342	0.99108	0.99035	0.01314	0.01372
11.39	0.99096	0.01344	0.99132	0.99058	0.01316	0.01374
11.4	0.99125	0.01334	0.99163	0.99087	0.01306	0.01363
11.41	0.99156	0.01331	0.99193	0.9912	0.01302	0.0136
11.42	0.99178	0.01316	0.99212	0.99141	0.01287	0.01346
11.43	0.99211	0.013	0.99246	0.99175	0.01269	0.01332
11.44	0.9923	0.01273	0.99266	0.99195	0.01245	0.01302
11.45	0.99239	0.01232	0.99275	0.99206	0.01203	0.01262
11.46	0.99264	0.01207	0.99299	0.9923	0.01179	0.01235
11.47	0.99266	0.01164	0.99301	0.99232	0.01135	0.01193
11.48	0.99277	0.01143	0.9931	0.99245	0.01116	0.01172
11.49	0.99268	0.01109	0.99299	0.99236	0.01083	0.01136
11.5	0.99263	0.01075	0.99294	0.99233	0.01048	0.01103
11.5387	0.99221	0.01	0.99271	0.99169	0.00953	0.01048
11.5603	0.99168	0.00983	0.99224	0.99118	0.00938	0.01031
11.5711	0.99142	0.00986	0.99193	0.99093	0.00941	0.01033
11.5819	0.99116	0.00996	0.99166	0.99066	0.00953	0.01044
11.5927	0.99091	0.01017	0.99147	0.9904	0.00971	0.01064
11.6036	0.99071	0.0105	0.99124	0.99017	0.01005	0.01101
11.6144	0.99059	0.01096	0.99116	0.99003	0.01047	0.01149
11.6253	0.99057	0.01145	0.99116	0.99002	0.01091	0.01205
11.6362	0.99067	0.01189	0.9913	0.99009	0.01133	0.01246
11.6472	0.99089	0.01206	0.99151	0.99029	0.01152	0.01264
11.6581	0.99113	0.01202	0.99178	0.99052	0.01147	0.01266
11.6691	0.99129	0.01182	0.99193	0.99069	0.01131	0.0124
11.6801	0.99135	0.01175	0.99199	0.99074	0.0112	0.01233
11.6911	0.99134	0.01186	0.992	0.9907	0.01134	0.0124
11.7021	0.99143	0.01205	0.9921	0.99083	0.01151	0.01262
11.7132	0.99167	0.01204	0.99234	0.99103	0.0115	0.01258
11.7243	0.99196	0.01169	0.99245	0.9915	0.01132	0.01207
11.7354	0.99214	0.01114	0.9926	0.99168	0.01078	0.01153
11.7465	0.99214	0.01071	0.99258	0.99167	0.01037	0.01108
11.7576	0.99193	0.0105	0.99241	0.99149	0.01013	0.01088
11.7688	0.99168	0.01059	0.99218	0.99124	0.01025	0.01096
11.78	0.99158	0.01087	0.99209	0.9911	0.01047	0.01128
11.7912	0.99164	0.01124	0.99218	0.99114	0.01082	0.01163
11.8024	0.99181	0.01159	0.99257	0.99111	0.01105	0.01217
11.8249	0.99245	0.01231	0.99331	0.9917	0.01175	0.01294
11.8475	0.99348	0.01288	0.99441	0.99263	0.01231	0.01354
11.8702	0.99469	0.01303	0.99562	0.99383	0.01241	0.01373
11.893	0.99582	0.0128	0.99684	0.9949	0.01221	0.01348
11.9158	0.99696	0.01228	0.99787	0.99612	0.01166	0.0129
11.9388	0.99759	0.01113	0.99836	0.99686	0.01059	0.01174
11.9618	0.99748	0.00983	0.99809	0.99685	0.00927	0.01039
11.9849	0.99714	0.00865	0.99769	0.99666	0.0082	0.00916
12.0082	0.99661	0.00747	0.99702	0.99622	0.00705	0.00792
12.0315	0.99567	0.00644	0.996	0.99537	0.00609	0.00684
12.0549	0.99487	0.00586	0.99516	0.99459	0.00552	0.0062
12.0783	0.99426	0.00535	0.9945	0.99402	0.00506	0.00568
12.1019	0.99344	0.00488	0.99366	0.99323	0.00462	0.00518
12.1256	0.99277	0.00474	0.99299	0.99256	0.00451	0.00503
12.1495	0.99226	0.00469	0.99248	0.99205	0.00446	0.00496
12.1733	0.99181	0.00471	0.99202	0.9916	0.00446	0.00499
12.1973	0.99148	0.00477	0.99167	0.99128	0.00453	0.00504
12.2213	0.99132	0.00477	0.99151	0.99113	0.00454	0.00503
12.2455	0.99087	0.00456	0.99106	0.99069	0.0043	0.00484
12.2697	0.99049	0.00451	0.99067	0.99034	0.00426	0.00478
12.4	0.9883	0.00488	0.98842	0.9882	0.00469	0.00507
12.5	0.98715	0.00476	0.98727	0.98703	0.00456	0.00497
12.6	0.9863	0.00504	0.98643	0.98618	0.00482	0.00528
12.7	0.98552	0.00505	0.98567	0.98537	0.00486	0.00527
12.8	0.98482	0.00519	0.98497	0.98467	0.00497	0.00546
12.9	0.98415	0.00539	0.98431	0.98399	0.00513	0.00566
13.0	0.98351	0.0055	0.98368	0.98335	0.00523	0.00577
13.5	0.98071	0.00626	0.9809	0.98051	0.00597	0.00658
14.0	0.97819	0.00711	0.97841	0.97796	0.00676	0.00746
14.5	0.97579	0.00802	0.97604	0.97555	0.00764	0.00842
15.0	0.97344	0.00896	0.97371	0.97316	0.00855	0.0094
15.5	0.97116	0.01003	0.97147	0.97085	0.00959	0.01049
16.0	0.96889	0.0111	0.96924	0.96853	0.01062	0.01157
16.5	0.96672	0.01226	0.96729	0.96619	0.01157	0.01301
17.0	0.96449	0.01347	0.96505	0.96394	0.01277	0.01429
17.5	0.96226	0.01458	0.96286	0.96168	0.01376	0.01541
18.0	0.9599	0.01594	0.96057	0.95923	0.01511	0.01679
18.5	0.95762	0.01716	0.9583	0.95693	0.01629	0.01809
19.0	0.95547	0.0185	0.95622	0.95472	0.01761	0.01942
19.5	0.95331	0.01999	0.95407	0.95256	0.0191	0.02097
20.0	0.95101	0.02103	0.95178	0.95023	0.02008	0.02199
20.5	0.94829	0.02239	0.9492	0.94748	0.02142	0.02341
21.0	0.94615	0.02335	0.94701	0.94528	0.02233	0.02449
21.5	0.94369	0.02515	0.94465	0.94276	0.02404	0.0264
22.0	0.94084	0.02565	0.94183	0.93987	0.02449	0.02692
22.5	0.93822	0.02747	0.93935	0.93717	0.02626	0.02867
23.0	0.93533	0.0287	0.93646	0.93417	0.0274	0.02998
23.5	0.93297	0.02985	0.93412	0.93181	0.02855	0.03124
24.0	0.93051	0.03165	0.93176	0.92928	0.03033	0.03297
24.5	0.92825	0.03591	0.92979	0.9268	0.03393	0.03784
25.0	0.92575	0.03774	0.92732	0.92416	0.03566	0.0398
26.0	0.92264	0.04303	0.92425	0.92122	0.04106	0.0445
27.0	0.91693	0.04512	0.91828	0.91579	0.04335	0.0469
28.0	0.9122	0.04879	0.91373	0.91109	0.04681	0.05116
29.0	0.90722	0.05303	0.90885	0.90559	0.05111	0.05545
30.0	0.90203	0.05755	0.90375	0.90039	0.05545	0.05997
31.0	0.89682	0.06223	0.89819	0.89545	0.06017	0.06437
32.0	0.89128	0.06763	0.89357	0.88913	0.06559	0.07025
33.0	0.88565	0.07312	0.88739	0.88355	0.07085	0.07556