# Optical constants for TaBN created by PTB
# Reconstructed from reflection measurements in the wavelength range 10 - 17.9 nm
# 60 nm TaBO/TaBN/Ru layerstack on Quarz (measured 05/2018)
# n = (1-delta) - (i*beta)
# 
# lambda/nm 1-delta beta
# ------------------------
10.00	 0.97529	 0.02344
10.10	 0.97495	 0.02367
10.20	 0.97432	 0.02381
10.30	 0.97392	 0.02389
10.40	 0.97329	 0.02389
10.50	 0.97287	 0.02411
10.60	 0.97223	 0.02419
10.70	 0.97176	 0.02430
10.80	 0.97094	 0.02453
10.90	 0.97039	 0.02476
11.00	 0.96974	 0.02480
11.20	 0.96854	 0.02504
11.30	 0.96779	 0.02522
11.40	 0.96690	 0.02564
11.50	 0.96631	 0.02635
11.60	 0.96593	 0.02599
11.70	 0.96465	 0.02641
11.80	 0.96437	 0.02639
11.90	 0.96362	 0.02682
12.00	 0.96279	 0.02707
12.10	 0.96204	 0.02734
12.20	 0.96122	 0.02769
12.30	 0.96050	 0.02801
12.40	 0.95976	 0.02826
12.50	 0.95898	 0.02855
12.60	 0.95824	 0.02886
12.70	 0.95742	 0.02914
12.80	 0.95663	 0.02940
12.90	 0.95572	 0.02978
13.00	 0.95494	 0.03009
13.10	 0.95404	 0.03041
13.20	 0.95315	 0.03074
13.30	 0.95230	 0.03103
13.40	 0.95141	 0.03141
13.50	 0.95048	 0.03176
13.60	 0.94954	 0.03207
13.70	 0.94863	 0.03249
13.80	 0.94765	 0.03288
13.90	 0.94675	 0.03317
14.00	 0.94603	 0.03346
14.10	 0.94494	 0.03384
14.20	 0.94396	 0.03421
14.30	 0.94287	 0.03462
14.40	 0.94196	 0.03498
14.50	 0.94094	 0.03533
14.60	 0.93994	 0.03574
14.70	 0.93910	 0.03603
14.80	 0.93803	 0.03640
14.90	 0.93690	 0.03674
15.00	 0.93592	 0.03714
15.10	 0.93464	 0.03756
15.20	 0.93380	 0.03792
15.30	 0.93256	 0.03841
15.40	 0.93148	 0.03887
15.50	 0.93004	 0.03921
15.60	 0.92913	 0.03971
15.70	 0.92769	 0.04025
15.80	 0.92623	 0.04068
15.90	 0.92572	 0.04099
16.00	 0.92435	 0.04178
16.10	 0.92267	 0.04224
16.20	 0.92204	 0.04275
16.30	 0.92001	 0.04342
16.40	 0.91874	 0.04404
16.50	 0.91712	 0.04450
16.60	 0.91631	 0.04533
16.70	 0.91501	 0.04617
16.80	 0.91331	 0.04691
16.90	 0.91209	 0.04733
17.00	 0.91076	 0.04827
17.10	 0.90976	 0.04867
17.30	 0.90607	 0.05060
17.40	 0.90458	 0.05140
17.50	 0.90280	 0.05253
17.60	 0.90150	 0.05314
17.70	 0.89990	 0.05417
17.80	 0.89807	 0.05539
17.90	 0.89680	 0.05618