# Optical constants for TaTeN created by PTB # Reconstructed from reflection measurements in the wavelength range 10 - 20 nm # 40 nm TaTeN thin film on Si (measured 04/2020) # n = (1-delta) - (i*beta) # # lambda/nm 1-delta beta # ------------------------ 10.00 0.97206 0.01146 10.20 0.97071 0.01255 10.40 0.96932 0.01383 10.60 0.96797 0.01529 10.80 0.96662 0.01693 11.00 0.96528 0.01884 11.20 0.96404 0.02092 11.40 0.96306 0.02322 11.60 0.96237 0.02554 11.80 0.96189 0.02800 12.00 0.96164 0.03037 12.20 0.96158 0.03260 12.40 0.96166 0.03461 12.60 0.96189 0.03649 12.80 0.96213 0.03824 13.00 0.96248 0.03995 13.20 0.96288 0.04157 13.40 0.96334 0.04312 13.60 0.96388 0.04446 13.80 0.96452 0.04571 14.00 0.96525 0.04664 14.20 0.96597 0.04738 14.40 0.96662 0.04818 14.60 0.96704 0.04872 14.80 0.96730 0.04947 15.00 0.96746 0.05032 15.20 0.96757 0.05100 15.40 0.96778 0.05209 15.60 0.96799 0.05250 15.80 0.96845 0.05367 16.00 0.96894 0.05458 16.20 0.96947 0.05500 16.40 0.96992 0.05517 16.60 0.97034 0.05531 16.80 0.97074 0.05573 17.00 0.97092 0.05576 17.20 0.97096 0.05562 17.40 0.97094 0.05575 17.60 0.97069 0.05543 17.80 0.97044 0.05514 18.00 0.96994 0.05490 18.20 0.96918 0.05455 18.40 0.96829 0.05429 18.60 0.96732 0.05424 18.80 0.96630 0.05439 19.00 0.96518 0.05464 19.20 0.96412 0.05500 19.40 0.96313 0.05573 19.60 0.96199 0.05600 19.80 0.96095 0.05715