# Optical constants for Ta created by PTB # Reconstructed from reflection measurements in the wavelength range 5 - 24 nm # 30 nm Ta thin film on Si (measured 12/2020) # n = (1-delta) - (i*beta) # The values are provided with their 3-sigma uncertainty bounds. HB: Higher Bound. LB: Lower Bound. #lambda/nm 1-delta beta 1-delta_LB 1-delta_HB beta_LB beta_HB # ------------------------ 5.0 0.99084 0.01225 0.99067 0.99101 0.01209 0.01241 5.25 0.99079 0.01309 0.99062 0.99096 0.01295 0.01325 5.5 0.99007 0.01361 0.98988 0.99025 0.01346 0.01375 5.75 0.98927 0.01429 0.98908 0.98945 0.01412 0.01445 6.0 0.98864 0.01514 0.98844 0.98884 0.01498 0.01531 6.25 0.98802 0.01597 0.98783 0.98824 0.0158 0.01614 6.5 0.9876 0.01693 0.98738 0.98779 0.01676 0.01713 6.75 0.98715 0.01777 0.98691 0.98737 0.01757 0.01796 7.0 0.98671 0.0187 0.98647 0.98693 0.01849 0.01888 7.25 0.98614 0.01943 0.98588 0.98636 0.01924 0.01964 7.5 0.98547 0.02012 0.98523 0.98575 0.01991 0.0203 7.75 0.98469 0.02055 0.98447 0.98495 0.02034 0.02072 8.0 0.98382 0.02093 0.98359 0.98407 0.02074 0.02114 8.25 0.98303 0.02142 0.98278 0.98332 0.02118 0.0216 8.5 0.98232 0.02196 0.98209 0.98257 0.02175 0.02217 8.75 0.98141 0.02249 0.98115 0.98166 0.02228 0.02272 9.0 0.98056 0.02311 0.98026 0.98084 0.02292 0.02331 9.25 0.97989 0.02403 0.97961 0.98015 0.02381 0.02422 9.5 0.97911 0.02452 0.97884 0.97934 0.02433 0.02469 9.75 0.9781 0.02496 0.97784 0.97838 0.02476 0.02518 10.0 0.97712 0.02562 0.97688 0.97741 0.02539 0.02585 10.25 0.97638 0.02635 0.97615 0.97663 0.02614 0.0266 10.5 0.97543 0.02707 0.97518 0.97566 0.02688 0.02726 10.75 0.97411 0.02736 0.97389 0.97435 0.02713 0.02759 11.0 0.9727 0.02791 0.97245 0.97297 0.02771 0.02815 11.25 0.97131 0.02867 0.97106 0.97156 0.02846 0.02889 11.5 0.96988 0.02953 0.96968 0.97011 0.02935 0.02976 11.75 0.96872 0.02997 0.96848 0.96896 0.02975 0.03021 12.0 0.96659 0.0306 0.96633 0.96689 0.03039 0.0308 12.25 0.96557 0.03225 0.96528 0.96586 0.03202 0.03247 12.5 0.96366 0.03144 0.96338 0.96392 0.0312 0.03172 12.75 0.96201 0.0321 0.96174 0.96227 0.03184 0.03239 13.0 0.96027 0.03262 0.95996 0.96051 0.03239 0.03285 13.25 0.9584 0.03302 0.95815 0.95866 0.03281 0.03329 13.5 0.95638 0.03348 0.95607 0.95668 0.03323 0.03373 13.75 0.95411 0.0339 0.95382 0.95438 0.03365 0.03417 14.0 0.95169 0.03439 0.95143 0.95199 0.03415 0.03465 14.25 0.94903 0.03495 0.94875 0.94928 0.03471 0.03519 14.5 0.94613 0.03558 0.94585 0.94643 0.03534 0.03581 14.75 0.94315 0.03622 0.94284 0.94348 0.03597 0.03647 15.0 0.94012 0.037 0.93978 0.94047 0.03671 0.03729 15.25 0.937 0.03799 0.93666 0.93736 0.03771 0.03829 15.5 0.93375 0.03918 0.93342 0.9341 0.0389 0.0395 15.75 0.9303 0.04056 0.92997 0.93066 0.04026 0.04086 16.0 0.92672 0.04214 0.92635 0.92709 0.04187 0.04243 16.25 0.92299 0.04394 0.92256 0.92343 0.04362 0.04426 16.5 0.91916 0.04601 0.91874 0.91952 0.04567 0.04634 16.75 0.91527 0.04838 0.91481 0.91567 0.04807 0.04873 17.0 0.91139 0.05099 0.91101 0.9118 0.05063 0.0513 17.25 0.90751 0.05405 0.90706 0.90792 0.05364 0.05442 17.5 0.9036 0.05738 0.90316 0.90403 0.05707 0.0578 17.75 0.89962 0.06085 0.89913 0.90003 0.06045 0.06121 18.0 0.89537 0.0646 0.89483 0.89598 0.06426 0.06499 18.25 0.89103 0.06868 0.89043 0.89165 0.06822 0.06911 18.5 0.88629 0.07282 0.88561 0.88702 0.07227 0.07331 18.75 0.88178 0.07749 0.88092 0.88249 0.07685 0.07817 19.0 0.87731 0.08255 0.87653 0.87804 0.08187 0.08324 19.25 0.87296 0.08796 0.87204 0.87378 0.08708 0.08877 19.5 0.86877 0.09386 0.86759 0.8697 0.09292 0.09471 19.75 0.86462 0.10027 0.86352 0.86563 0.09923 0.10121 20.0 0.86097 0.10729 0.85993 0.86204 0.10631 0.10822 20.25 0.85754 0.11472 0.85647 0.85876 0.11378 0.11572 20.5 0.85472 0.12259 0.85347 0.85582 0.12162 0.1236 20.75 0.8522 0.13098 0.85104 0.85339 0.12995 0.13225 21.0 0.85053 0.13973 0.84932 0.85179 0.13875 0.14089 21.25 0.84902 0.14846 0.84754 0.85029 0.14737 0.14952 21.5 0.84811 0.15737 0.84663 0.84971 0.15632 0.1586 21.75 0.84769 0.16659 0.84624 0.84925 0.16544 0.16768 22.0 0.84766 0.17569 0.84597 0.84923 0.17448 0.17687 22.25 0.84763 0.18408 0.84585 0.84918 0.18294 0.18532 22.5 0.84859 0.19191 0.84674 0.85048 0.1905 0.19328 22.75 0.85031 0.1985 0.84808 0.85266 0.197 0.19976 23.0 0.85237 0.20405 0.85017 0.85484 0.20264 0.20551 23.25 0.8563 0.2078 0.85393 0.85855 0.20631 0.209 23.5 0.86132 0.20996 0.8591 0.86335 0.20865 0.21151 23.75 0.86603 0.2099 0.86382 0.86814 0.20856 0.21117 24.0 0.86884 0.20849 0.86616 0.87114 0.20698 0.20973