# Optical constants for TiN created by PTB
# Reconstructed from reflection measurements in the wavelength range 4.5 - 24.0 nm
# 30 nm TiN thin film on Si  (measured 2024)
# n = (1-delta) - (i*beta)
# Citation: Q. Saadeh, V. Philipsen, J. Meersschaut, V. S. K. Channam, K.-A. Kantre, A. Sokolov, B. Kupper, T. Wiesner, D. O. García, Z. Salami, C. Buchholz, F. Scholze, and V. Soltwisch, "Optical constants of TiN, amorphous SiO2, and SiN in the extreme ultraviolet range," Appl. Opt. 63(36), 9210-9222 (2024).
# The values are provided with their 3-sigma uncertainty bounds. HB: Higher Bound. LB: Lower Bound.
#lambda/nm	1-delta	beta	1-delta_LB	1-delta_HB	beta_LB	beta_HB
# ------------------------
4.5	0.99328	0.00135	0.99331	0.99324	0.0013	0.00139
4.75	0.99243	0.00156	0.99246	0.99239	0.00151	0.00161
5.0	0.99154	0.00185	0.99157	0.9915	0.0018	0.0019
5.25	0.99068	0.00211	0.99072	0.99065	0.00206	0.00217
5.5	0.98967	0.00231	0.98971	0.98964	0.00225	0.00237
5.75	0.98875	0.00264	0.98879	0.98871	0.00259	0.00271
6.0	0.98781	0.00298	0.98785	0.98777	0.00291	0.00305
6.25	0.9868	0.00314	0.98685	0.98674	0.00307	0.0032
6.5	0.98568	0.00343	0.98573	0.98563	0.00336	0.0035
6.75	0.98449	0.00392	0.98454	0.98443	0.00384	0.00401
7.0	0.98338	0.00439	0.98344	0.98332	0.0043	0.00449
7.25	0.98228	0.00494	0.98234	0.98222	0.00484	0.00503
7.5	0.98116	0.00529	0.98124	0.98111	0.0052	0.00539
7.75	0.97999	0.00568	0.98005	0.97992	0.0056	0.00576
8.0	0.97875	0.00572	0.97883	0.97868	0.00563	0.00582
8.5	0.97626	0.00718	0.97641	0.9761	0.00697	0.00739
8.75	0.97488	0.0077	0.97504	0.97471	0.00747	0.00793
9.0	0.9736	0.00835	0.97376	0.97344	0.00811	0.00862
9.25	0.97234	0.009	0.97251	0.97216	0.00876	0.00925
9.5	0.9711	0.00929	0.97127	0.97093	0.00905	0.00955
9.75	0.96972	0.00962	0.9699	0.96952	0.00938	0.00986
10.0	0.96817	0.01	0.96835	0.96799	0.00976	0.01028
10.25	0.96662	0.01057	0.96682	0.96642	0.0103	0.01086
10.5	0.96501	0.0112	0.96521	0.9648	0.01095	0.01148
10.75	0.96361	0.01211	0.96381	0.9634	0.01183	0.01239
11.0	0.96199	0.01213	0.9622	0.96177	0.01184	0.01244
11.25	0.96018	0.0128	0.9604	0.95997	0.0125	0.01309
11.5	0.95962	0.01464	0.95986	0.95939	0.01431	0.01497
11.75	0.95754	0.01323	0.95775	0.95732	0.01292	0.01355
12.0	0.955	0.0143	0.95522	0.95476	0.01396	0.01465
12.25	0.95329	0.01591	0.95354	0.95303	0.01553	0.01629
12.5	0.95189	0.01593	0.95214	0.95165	0.01559	0.01628
12.75	0.94988	0.01643	0.95013	0.94962	0.01607	0.01685
13.0	0.94779	0.01706	0.94805	0.9475	0.01669	0.01746
13.25	0.94566	0.01785	0.94592	0.94537	0.01745	0.01828
13.5	0.94353	0.01877	0.94383	0.94323	0.01836	0.01919
13.75	0.94145	0.01969	0.94175	0.94116	0.01924	0.02013
14.0	0.9394	0.02056	0.93971	0.93907	0.02007	0.02101
14.25	0.93733	0.02138	0.93764	0.93702	0.02091	0.02187
14.5	0.93519	0.02211	0.93551	0.93487	0.02159	0.02263
14.75	0.93297	0.02279	0.93329	0.93263	0.02231	0.02334
15.0	0.93068	0.02337	0.93102	0.93032	0.02284	0.0239
15.25	0.92826	0.02394	0.92859	0.9279	0.02341	0.02447
15.5	0.92567	0.0245	0.92605	0.9253	0.024	0.02507
15.75	0.92292	0.02511	0.92326	0.92254	0.02454	0.02569
16.0	0.91998	0.0258	0.92034	0.91962	0.02523	0.02636
16.25	0.91683	0.02655	0.9172	0.91646	0.02596	0.02711
16.5	0.9135	0.02744	0.91387	0.9131	0.02682	0.02804
16.75	0.91003	0.02846	0.91041	0.90966	0.02789	0.02912
17.0	0.90648	0.02954	0.90687	0.90608	0.02893	0.03017
17.25	0.90265	0.03094	0.90305	0.90221	0.03034	0.03159
17.5	0.89885	0.03214	0.89927	0.89841	0.03142	0.03283
17.75	0.89487	0.03347	0.89529	0.89442	0.03278	0.0342
18.0	0.89077	0.03491	0.8912	0.89026	0.03424	0.03567
18.25	0.88647	0.03643	0.88694	0.88599	0.0357	0.03726
18.5	0.88197	0.03814	0.8825	0.88149	0.03733	0.03891
18.75	0.8772	0.03998	0.87772	0.87666	0.03922	0.04075
19.0	0.8721	0.04218	0.87265	0.87151	0.04132	0.04296
19.25	0.86685	0.04463	0.86747	0.86624	0.0438	0.04549
19.5	0.86138	0.04759	0.86204	0.86072	0.04671	0.04846
19.75	0.85572	0.05109	0.85642	0.85505	0.05021	0.05206
20.0	0.85	0.05503	0.85074	0.84927	0.05403	0.056
20.25	0.8442	0.05958	0.84496	0.8434	0.05856	0.06061
20.5	0.83837	0.06443	0.83918	0.83758	0.06328	0.06562
20.75	0.83247	0.06949	0.83336	0.83163	0.06827	0.07061
21.0	0.82643	0.07532	0.82739	0.82559	0.07414	0.07646
21.25	0.82038	0.08158	0.82135	0.81939	0.08036	0.08292
21.5	0.81442	0.08884	0.81551	0.81329	0.08732	0.09029
21.75	0.80838	0.09622	0.8095	0.80724	0.09458	0.09797
22.0	0.80279	0.10488	0.80412	0.80152	0.10272	0.10678
22.25	0.79768	0.11425	0.79897	0.79624	0.11183	0.11646
22.5	0.79308	0.1241	0.79462	0.79172	0.1215	0.12696
22.75	0.78929	0.13505	0.7909	0.78757	0.13201	0.1385
23.0	0.7862	0.14567	0.78797	0.78442	0.14207	0.14929
23.25	0.78379	0.1572	0.78592	0.78192	0.15285	0.16164
23.5	0.78266	0.16899	0.78495	0.78048	0.16402	0.17395
23.75	0.78245	0.18142	0.78491	0.77987	0.17631	0.18663
24.0	0.78396	0.19437	0.78693	0.7813	0.18917	0.20003