# Optical constants for ZrO2 created by PTB # Determined from reflection measurements in the wavelength range 4.9 - 25.75 nm # 42.5 nm ZrO2 thin film on Si (measured 07/2024) # n = (1-delta) - (i*beta) # Citation: Q. Saadeh, A. Sokolov, M. Störmer, et al., "Optical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au, and ZrO2 in the extreme ultraviolet range," Opt. Express 34(15), 28239-28292 (2026). # The values are provided with their 3-sigma uncertainty bounds. HB: Higher Bound. LB: Lower Bound. # lambda/nm 1-delta beta 1-delta_LB 1-delta_HB beta_LB beta_HB # ------------------------ 4.9 0.99542 0.00509 0.9955 0.99535 0.00501 0.00519 5.0 0.99578 0.00508 0.99584 0.9957 0.00499 0.00517 5.1 0.99575 0.00475 0.99582 0.99569 0.00467 0.00484 5.2 0.99568 0.00447 0.99574 0.99562 0.00439 0.00455 5.3 0.99549 0.00419 0.99554 0.99545 0.00412 0.00425 5.4 0.99514 0.00401 0.99519 0.99509 0.00395 0.00408 5.5 0.99464 0.004 0.99468 0.99459 0.00394 0.00407 5.6 0.99432 0.00425 0.99437 0.99427 0.00418 0.00431 5.7 0.99432 0.00453 0.99438 0.99427 0.00445 0.00459 5.8 0.99473 0.0046 0.99478 0.99468 0.00453 0.00467 5.9 0.99501 0.00403 0.99506 0.99497 0.00398 0.00409 6.0 0.99472 0.00342 0.99475 0.99468 0.00338 0.00347 6.1 0.99418 0.00309 0.99421 0.99415 0.00305 0.00313 6.2 0.99372 0.00288 0.99375 0.99369 0.00285 0.00292 6.3 0.99322 0.00265 0.99325 0.9932 0.00262 0.00269 6.4 0.99264 0.0025 0.99267 0.99262 0.00247 0.00254 6.5 0.99201 0.00239 0.99204 0.99199 0.00236 0.00242 6.6 0.9914 0.00245 0.99142 0.99137 0.00241 0.00248 6.7 0.99086 0.00255 0.99089 0.99084 0.00252 0.00259 6.8 0.99039 0.00263 0.99041 0.99036 0.0026 0.00268 6.9 0.98986 0.00266 0.98989 0.98983 0.00262 0.0027 7.0 0.98933 0.00276 0.98936 0.9893 0.00271 0.0028 7.1 0.98884 0.00288 0.98887 0.98881 0.00284 0.00292 7.2 0.98837 0.003 0.98841 0.98834 0.00297 0.00305 7.3 0.98788 0.00312 0.98792 0.98785 0.00308 0.00316 7.4 0.98742 0.00322 0.98745 0.98738 0.00317 0.00326 7.5 0.98694 0.00329 0.98697 0.98691 0.00325 0.00334 7.6 0.98646 0.00337 0.9865 0.98643 0.00333 0.00342 7.7 0.98596 0.00343 0.98599 0.98592 0.00339 0.00348 7.8 0.98551 0.00362 0.98554 0.98548 0.00357 0.00367 7.9 0.98502 0.00367 0.98505 0.98498 0.00362 0.00372 8.0 0.98452 0.00378 0.98455 0.98448 0.00373 0.00384 8.1 0.98404 0.00396 0.98408 0.984 0.00391 0.00402 8.25 0.98331 0.00419 0.98335 0.98327 0.00414 0.00425 8.5 0.98211 0.00455 0.98215 0.98207 0.00449 0.0046 8.75 0.98087 0.00489 0.98091 0.98082 0.00483 0.00494 9.0 0.97961 0.00526 0.97966 0.97957 0.0052 0.00533 9.25 0.97833 0.00573 0.97837 0.97828 0.00566 0.0058 9.5 0.97701 0.00609 0.97706 0.97697 0.00602 0.00616 9.75 0.97562 0.00648 0.97568 0.97557 0.0064 0.00656 10.0 0.97418 0.00684 0.97424 0.97413 0.00675 0.00692 10.25 0.9727 0.00709 0.97276 0.97264 0.00701 0.00718 10.5 0.97114 0.00747 0.97121 0.97107 0.00738 0.00757 10.75 0.96959 0.008 0.96965 0.96953 0.00791 0.0081 11.0 0.96808 0.00853 0.96815 0.96801 0.00843 0.00863 11.25 0.96628 0.0089 0.96636 0.96619 0.00877 0.00902 11.5 0.96494 0.01036 0.96501 0.96486 0.01022 0.01049 11.75 0.96337 0.01076 0.96345 0.96328 0.01063 0.01089 12.0 0.96142 0.01084 0.96152 0.96132 0.01068 0.01099 12.25 0.95959 0.01183 0.95969 0.95947 0.01169 0.01199 12.5 0.95796 0.01238 0.95806 0.95786 0.01223 0.01252 12.75 0.95617 0.0131 0.95627 0.95607 0.01293 0.01326 13.0 0.95436 0.01387 0.95448 0.95426 0.01371 0.01405 13.25 0.95253 0.01466 0.95265 0.95241 0.01449 0.01483 13.5 0.95067 0.01547 0.95079 0.95055 0.01526 0.01566 13.75 0.9488 0.01632 0.94894 0.94867 0.01612 0.01652 14.25 0.94498 0.01807 0.94513 0.94483 0.01783 0.0183 14.5 0.94301 0.01897 0.94317 0.94288 0.01872 0.01922 14.75 0.94104 0.01988 0.94119 0.94088 0.01963 0.02016 15.0 0.93901 0.02082 0.93917 0.93883 0.02056 0.02111 15.25 0.93694 0.02177 0.9371 0.93676 0.02151 0.02204 15.5 0.93478 0.02271 0.93494 0.9346 0.02243 0.02298 15.75 0.93263 0.02377 0.93281 0.93245 0.02345 0.02405 16.0 0.93041 0.02475 0.9306 0.93021 0.02445 0.02507 16.25 0.92815 0.02584 0.92835 0.92796 0.02551 0.02614 16.5 0.92587 0.02693 0.92606 0.92568 0.02661 0.02727 16.75 0.92352 0.02806 0.92373 0.92331 0.0277 0.0284 17.0 0.92113 0.02918 0.92134 0.92091 0.02884 0.02952 17.25 0.91871 0.03031 0.91894 0.91849 0.02999 0.03067 17.5 0.91624 0.03154 0.91648 0.91604 0.03118 0.03188 17.75 0.91367 0.03272 0.91388 0.91343 0.03237 0.03312 18.0 0.91101 0.03409 0.91123 0.91078 0.03372 0.03448 18.25 0.90834 0.03538 0.90858 0.9081 0.03502 0.03577 18.5 0.90558 0.03666 0.90583 0.90533 0.03628 0.03708 18.75 0.90276 0.03816 0.903 0.90251 0.03775 0.03861 19.0 0.89985 0.03982 0.90014 0.89956 0.03938 0.04023 19.25 0.89687 0.04126 0.89714 0.89659 0.04082 0.04171 19.5 0.89384 0.04292 0.89413 0.89355 0.04244 0.0434 19.75 0.89063 0.04477 0.89093 0.89031 0.04429 0.04528 20.0 0.88726 0.04627 0.88755 0.88696 0.04571 0.04682 20.25 0.88385 0.04784 0.88416 0.88353 0.04728 0.0484 20.5 0.88028 0.04978 0.88061 0.87995 0.04917 0.0504 20.75 0.87666 0.05164 0.87697 0.87631 0.05104 0.05223 21.0 0.87291 0.0536 0.87323 0.87256 0.05297 0.05424 21.25 0.86897 0.05592 0.86938 0.86864 0.05528 0.05657 21.5 0.865 0.05837 0.86542 0.86457 0.05775 0.05901 21.75 0.86077 0.06101 0.86116 0.86037 0.06029 0.06172 22.0 0.85653 0.06376 0.85694 0.85613 0.06303 0.06444 22.25 0.85214 0.06649 0.85255 0.8517 0.06574 0.06727 22.5 0.84767 0.06992 0.84814 0.84724 0.06917 0.07066 22.75 0.84316 0.07394 0.84364 0.84269 0.0731 0.07469 23.0 0.83845 0.0782 0.83892 0.83798 0.07736 0.07904 23.25 0.83379 0.08279 0.8343 0.8333 0.08187 0.08374 23.5 0.82913 0.08727 0.82964 0.82859 0.08617 0.08827 23.75 0.8246 0.09236 0.82514 0.82398 0.09119 0.09357 24.0 0.82025 0.09748 0.82086 0.81967 0.09633 0.09875 24.25 0.81607 0.10337 0.81665 0.81547 0.102 0.10468 24.5 0.81206 0.109 0.81267 0.81138 0.10751 0.11048 24.75 0.80816 0.115 0.80884 0.80751 0.11335 0.11652 25.0 0.80443 0.12137 0.80515 0.80377 0.1196 0.12299 25.25 0.80083 0.12833 0.80163 0.8 0.12658 0.12995 25.5 0.79745 0.13467 0.79826 0.79662 0.13292 0.13638 25.75 0.79453 0.14263 0.79548 0.79364 0.14093 0.14444