# Optical constants for amorphous SiO2 created by PTB
# Reconstructed from reflection measurements in the wavelength range 5.0 - 24.5 nm
# 50 nm amorphous SiO2 thin film on Si  (measured 2024)
# n = (1-delta) - (i*beta)
# Citation: Q. Saadeh, V. Philipsen, J. Meersschaut, V. S. K. Channam, K.-A. Kantre, A. Sokolov, B. Kupper, T. Wiesner, D. O. García, Z. Salami, C. Buchholz, F. Scholze, and V. Soltwisch, "Optical constants of TiN, amorphous SiO2, and SiN in the extreme ultraviolet range," Appl. Opt. 63(36), 9210-9222 (2024).
# The values are provided with their 3-sigma uncertainty bounds. HB: Higher Bound. LB: Lower Bound.
#lambda/nm	1-delta	beta	1-delta_LB	1-delta_HB	beta_LB	beta_HB
# ------------------------
5.0	0.99426	0.00246	0.99431	0.99421	0.00236	0.00256
5.25	0.99373	0.00279	0.99378	0.99367	0.00269	0.0029
5.5	0.99312	0.00322	0.99317	0.99306	0.00311	0.00333
5.75	0.99267	0.00376	0.99273	0.9926	0.00363	0.00389
6.0	0.99227	0.00433	0.99235	0.9922	0.0042	0.00448
6.1	0.99212	0.00453	0.9922	0.99205	0.00439	0.00467
6.2	0.99198	0.00471	0.99206	0.9919	0.00457	0.00486
6.3	0.99185	0.00489	0.99193	0.99177	0.00474	0.00505
6.4	0.99171	0.00506	0.99179	0.99163	0.00491	0.00521
6.5	0.99157	0.00521	0.99165	0.99148	0.00506	0.00536
6.6	0.99141	0.00538	0.9915	0.99133	0.00524	0.00554
6.7	0.99123	0.00557	0.99132	0.99115	0.00543	0.00573
6.8	0.99101	0.00574	0.9911	0.99092	0.00559	0.0059
6.9	0.99076	0.00593	0.99085	0.99067	0.00577	0.0061
7.0	0.99054	0.00617	0.99064	0.99045	0.00601	0.00633
7.1	0.99038	0.00641	0.99048	0.99029	0.00625	0.00658
7.2	0.9902	0.00658	0.99029	0.9901	0.00642	0.00674
7.3	0.98993	0.00673	0.99002	0.98984	0.00657	0.0069
7.4	0.98969	0.00692	0.98979	0.9896	0.00675	0.00709
7.5	0.98946	0.00708	0.98956	0.98936	0.00692	0.00725
7.6	0.98919	0.00726	0.98929	0.98909	0.00709	0.00743
7.7	0.98875	0.00734	0.98886	0.98864	0.00712	0.00755
7.71	0.98868	0.00739	0.9888	0.98857	0.00718	0.00761
7.72	0.9886	0.00745	0.98872	0.98849	0.00725	0.00768
7.73	0.98852	0.00754	0.98865	0.9884	0.00732	0.00776
7.74	0.98845	0.00766	0.98858	0.98833	0.00743	0.0079
7.75	0.98839	0.0078	0.98852	0.98826	0.00757	0.00805
7.76	0.98834	0.00797	0.98847	0.98822	0.00774	0.00821
7.77	0.98835	0.00818	0.98848	0.98822	0.00794	0.00843
7.78	0.98839	0.00839	0.98854	0.98825	0.00816	0.00866
7.79	0.98849	0.0086	0.98865	0.98835	0.00834	0.00886
7.8	0.98865	0.00879	0.9888	0.98851	0.00854	0.00903
7.81	0.98884	0.00891	0.989	0.98869	0.00866	0.00918
7.82	0.98906	0.00898	0.98923	0.9889	0.00872	0.00925
7.83	0.98927	0.00896	0.98943	0.98911	0.00871	0.00924
7.84	0.98943	0.00888	0.9896	0.98927	0.00864	0.00914
7.85	0.98955	0.00874	0.9897	0.9894	0.00849	0.009
7.86	0.9896	0.00858	0.98976	0.98945	0.00834	0.00884
7.87	0.98962	0.00843	0.98977	0.98948	0.00821	0.00868
7.88	0.98961	0.00831	0.98975	0.98946	0.00809	0.00857
7.89	0.98958	0.00823	0.98972	0.98945	0.008	0.00845
7.9	0.98955	0.00815	0.98969	0.98942	0.00793	0.00839
7.91	0.98952	0.00809	0.98965	0.98938	0.00787	0.00833
7.92	0.98948	0.00805	0.98963	0.98935	0.00782	0.00828
7.93	0.98944	0.00801	0.98957	0.98931	0.00779	0.00823
7.94	0.9894	0.00797	0.98953	0.98928	0.00776	0.0082
7.95	0.98936	0.00795	0.98949	0.98923	0.00772	0.00818
7.96	0.98932	0.00793	0.98945	0.98919	0.0077	0.00815
7.97	0.98927	0.00792	0.9894	0.98915	0.00771	0.00814
7.98	0.98922	0.00791	0.98935	0.98909	0.00769	0.00813
7.99	0.98918	0.0079	0.9893	0.98905	0.00769	0.00813
8.0	0.98913	0.00791	0.98926	0.98901	0.00768	0.00813
8.1	0.98875	0.00817	0.98886	0.98863	0.00798	0.00835
8.2	0.98836	0.00834	0.98847	0.98825	0.00816	0.00854
8.3	0.98802	0.00862	0.98813	0.9879	0.00843	0.00882
8.4	0.98768	0.00891	0.9878	0.98756	0.00871	0.00912
8.5	0.98735	0.00927	0.98747	0.98722	0.00906	0.00948
8.6	0.98705	0.00968	0.98718	0.98692	0.00945	0.00991
8.7	0.98679	0.01015	0.98693	0.98665	0.00992	0.01039
8.8	0.98663	0.01074	0.98678	0.98648	0.0105	0.01099
8.9	0.98652	0.01133	0.98668	0.98636	0.01108	0.01158
9.0	0.98657	0.01197	0.98675	0.98639	0.0117	0.01223
9.1	0.98674	0.01261	0.98695	0.98655	0.01233	0.01289
9.2	0.98702	0.01324	0.98723	0.98682	0.01296	0.01351
9.3	0.98732	0.01372	0.98755	0.98712	0.01346	0.01399
9.4	0.98769	0.01407	0.98792	0.98748	0.01379	0.01433
9.5	0.98815	0.01429	0.98839	0.98792	0.01401	0.01458
9.6	0.9887	0.01439	0.98894	0.98846	0.01412	0.01466
9.7	0.98918	0.01421	0.98943	0.98896	0.01395	0.01447
9.8	0.98955	0.01383	0.98977	0.98934	0.01358	0.01408
9.9	0.98979	0.01317	0.98998	0.98958	0.01295	0.0134
10.0	0.98981	0.01226	0.98998	0.98965	0.01205	0.01247
10.1	0.98945	0.01119	0.98958	0.98932	0.01101	0.01138
10.2	0.98868	0.01026	0.98878	0.98857	0.01009	0.01044
10.3	0.98761	0.00969	0.98771	0.98751	0.00953	0.00986
10.4	0.98649	0.00969	0.98659	0.98639	0.00953	0.00986
10.5	0.98548	0.01002	0.9856	0.98536	0.00981	0.01023
10.51	0.98539	0.01011	0.98551	0.98527	0.0099	0.01033
10.52	0.9853	0.01019	0.98542	0.98518	0.00999	0.0104
10.53	0.98522	0.01029	0.98534	0.98509	0.01007	0.01051
10.54	0.98514	0.01038	0.98525	0.98502	0.01017	0.01059
10.55	0.98507	0.01048	0.9852	0.98495	0.01028	0.0107
10.56	0.985	0.0106	0.98513	0.98488	0.01039	0.01083
10.57	0.98495	0.01071	0.98508	0.98482	0.01048	0.01093
10.58	0.9849	0.01083	0.98503	0.98477	0.0106	0.01105
10.59	0.98485	0.01095	0.98499	0.98472	0.01071	0.01118
10.6	0.98482	0.01107	0.98495	0.98468	0.01083	0.01131
10.61	0.98478	0.01118	0.98492	0.98465	0.01095	0.01143
10.62	0.98476	0.0113	0.98489	0.98462	0.01107	0.01155
10.63	0.98474	0.01142	0.98488	0.98459	0.01118	0.01167
10.64	0.98473	0.01154	0.98487	0.98459	0.01129	0.01179
10.65	0.98473	0.01167	0.98488	0.98458	0.01141	0.01192
10.66	0.98474	0.01179	0.98488	0.98459	0.01154	0.01204
10.67	0.98475	0.01192	0.98491	0.98461	0.01167	0.01219
10.68	0.98478	0.01204	0.98493	0.98463	0.01178	0.01231
10.69	0.98481	0.01217	0.98497	0.98466	0.01189	0.01246
10.7	0.98486	0.01229	0.98502	0.9847	0.01203	0.01255
10.71	0.98492	0.0124	0.98508	0.98476	0.01215	0.01268
10.72	0.98499	0.01252	0.98515	0.98483	0.01226	0.0128
10.73	0.98507	0.01263	0.98524	0.9849	0.01237	0.01291
10.74	0.98516	0.01273	0.98532	0.985	0.01246	0.013
10.75	0.98526	0.01281	0.98543	0.98509	0.01254	0.01308
10.76	0.98536	0.01288	0.98553	0.98519	0.01261	0.01316
10.77	0.98548	0.01293	0.98566	0.98531	0.01266	0.01321
10.78	0.9856	0.01296	0.98578	0.98542	0.0127	0.01324
10.79	0.98572	0.01297	0.9859	0.98554	0.0127	0.01325
10.8	0.98584	0.01297	0.98602	0.98567	0.01269	0.01325
10.81	0.98596	0.01294	0.98614	0.98578	0.01267	0.01321
10.82	0.98607	0.01288	0.98625	0.9859	0.01261	0.01316
10.83	0.98618	0.01281	0.98637	0.98601	0.01254	0.01309
10.84	0.98627	0.01272	0.98644	0.98608	0.01244	0.013
10.85	0.98635	0.01261	0.98652	0.98617	0.01236	0.01287
10.86	0.98641	0.0125	0.98659	0.98624	0.01224	0.01277
10.87	0.98646	0.01237	0.98664	0.9863	0.0121	0.01263
10.88	0.9865	0.01224	0.98667	0.98633	0.01199	0.01253
10.89	0.98651	0.0121	0.98668	0.98635	0.01183	0.01237
10.9	0.98652	0.01197	0.98667	0.98635	0.01172	0.01222
10.91	0.9865	0.01184	0.98665	0.98634	0.0116	0.0121
10.92	0.98646	0.01171	0.98662	0.98631	0.01146	0.01197
10.93	0.98641	0.01159	0.98657	0.98626	0.01135	0.01184
10.94	0.98635	0.01148	0.9865	0.9862	0.01124	0.01171
10.95	0.98628	0.01138	0.98643	0.98614	0.01114	0.01163
10.96	0.9862	0.01129	0.98634	0.98606	0.01105	0.01153
10.97	0.98611	0.01121	0.98625	0.98596	0.01098	0.01145
10.98	0.98602	0.01115	0.98616	0.98588	0.01093	0.01139
10.99	0.98592	0.0111	0.98607	0.98578	0.01086	0.01134
11.0	0.98583	0.01107	0.98597	0.9857	0.01082	0.01132
11.01	0.98573	0.01104	0.98588	0.98559	0.01081	0.01127
11.02	0.98564	0.01102	0.98578	0.9855	0.0108	0.01126
11.03	0.98556	0.01101	0.9857	0.98542	0.01078	0.01125
11.04	0.98547	0.01101	0.98561	0.98534	0.01079	0.01126
11.05	0.9854	0.01101	0.98554	0.98525	0.01077	0.01125
11.06	0.98532	0.01101	0.98546	0.98518	0.01078	0.01124
11.07	0.98525	0.01101	0.98539	0.9851	0.01076	0.01124
11.08	0.98518	0.01101	0.98532	0.98504	0.01078	0.01126
11.09	0.98511	0.01101	0.98525	0.98497	0.01077	0.01125
11.1	0.98504	0.01101	0.98518	0.9849	0.01078	0.01126
11.11	0.98498	0.011	0.98512	0.98484	0.01076	0.01125
11.12	0.9849	0.01098	0.98504	0.98477	0.01074	0.01122
11.13	0.98483	0.01096	0.98497	0.98469	0.01072	0.0112
11.14	0.98475	0.01094	0.98488	0.98461	0.0107	0.01118
11.15	0.98467	0.01092	0.9848	0.98453	0.01069	0.01117
11.16	0.98457	0.01089	0.98471	0.98444	0.01065	0.01115
11.17	0.98445	0.01088	0.98458	0.98431	0.01066	0.01112
11.18	0.98433	0.01085	0.98446	0.9842	0.01061	0.01109
11.19	0.98421	0.01081	0.98433	0.98407	0.01058	0.01106
11.2	0.98407	0.01078	0.9842	0.98393	0.01057	0.01102
11.21	0.98391	0.01076	0.98404	0.98378	0.01052	0.011
11.22	0.98374	0.01073	0.98387	0.9836	0.01051	0.01099
11.23	0.98355	0.01071	0.98368	0.98342	0.01047	0.01097
11.24	0.98333	0.01071	0.98346	0.9832	0.01048	0.01095
11.25	0.9831	0.01073	0.98323	0.98296	0.0105	0.01097
11.26	0.98283	0.01076	0.98296	0.98269	0.01054	0.01101
11.27	0.98255	0.01084	0.98268	0.98242	0.0106	0.01106
11.28	0.98224	0.01093	0.98238	0.98211	0.01069	0.01117
11.29	0.98192	0.0111	0.98206	0.98179	0.01085	0.01135
11.3	0.98157	0.01131	0.98171	0.98142	0.01106	0.01157
11.31	0.98124	0.0116	0.9814	0.9811	0.01136	0.01187
11.32	0.98092	0.01198	0.98106	0.98077	0.01171	0.01225
11.33	0.98063	0.0124	0.98078	0.98047	0.01212	0.0127
11.34	0.98037	0.01292	0.98054	0.9802	0.01264	0.01321
11.35	0.98018	0.01351	0.98035	0.97999	0.01319	0.01381
11.36	0.98006	0.01416	0.98026	0.97987	0.01385	0.0145
11.37	0.98003	0.01488	0.98023	0.97983	0.01454	0.01521
11.38	0.98009	0.01563	0.98031	0.97986	0.01529	0.01601
11.39	0.98028	0.01644	0.98052	0.98004	0.01607	0.0168
11.4	0.98061	0.01727	0.98088	0.98035	0.01687	0.01765
11.41	0.98105	0.01806	0.98134	0.98077	0.01766	0.01846
11.42	0.98164	0.01883	0.98199	0.98134	0.01841	0.01927
11.43	0.98238	0.01953	0.98272	0.98207	0.01911	0.01999
11.44	0.98326	0.02013	0.98365	0.9829	0.01969	0.02058
11.45	0.98423	0.02058	0.98463	0.98384	0.02015	0.02102
11.46	0.98527	0.02087	0.98569	0.98486	0.02044	0.02131
11.47	0.98632	0.02098	0.98674	0.98587	0.02053	0.0214
11.48	0.98737	0.02093	0.98787	0.98692	0.0205	0.0214
11.49	0.98841	0.02072	0.98889	0.98793	0.02032	0.02115
11.5	0.98936	0.02034	0.98984	0.98891	0.01992	0.02073
11.51	0.99021	0.01983	0.9907	0.98974	0.01946	0.02021
11.52	0.99095	0.01919	0.99147	0.99047	0.01881	0.01959
11.53	0.99154	0.01849	0.99202	0.99109	0.01815	0.01885
11.54	0.99193	0.01766	0.99239	0.99149	0.01735	0.01799
11.55	0.99215	0.0168	0.99255	0.99177	0.01651	0.0171
11.56	0.99217	0.01584	0.99252	0.99183	0.01556	0.01615
11.57	0.99197	0.01487	0.99227	0.99167	0.01461	0.01514
11.58	0.9916	0.0139	0.99187	0.99136	0.01364	0.01416
11.59	0.99111	0.01299	0.99135	0.9909	0.01274	0.01322
11.6	0.99052	0.01218	0.99071	0.99035	0.01195	0.0124
11.61	0.98981	0.0115	0.98997	0.98965	0.01128	0.01173
11.62	0.98899	0.01109	0.98914	0.98885	0.01088	0.01132
11.63	0.9881	0.01107	0.98825	0.98796	0.01086	0.01131
11.64	0.98737	0.01155	0.98753	0.98722	0.01132	0.01179
11.65	0.98702	0.01247	0.9872	0.98685	0.01222	0.01274
11.66	0.98726	0.01349	0.98746	0.98706	0.01322	0.01376
11.67	0.98798	0.01418	0.98821	0.98775	0.0139	0.01447
11.68	0.98866	0.01415	0.9889	0.98843	0.01386	0.01443
11.69	0.98877	0.01351	0.98898	0.98856	0.01323	0.01379
11.7	0.98836	0.01297	0.98855	0.98816	0.01272	0.01324
11.71	0.98801	0.01326	0.98821	0.98781	0.01298	0.01353
11.72	0.98828	0.01421	0.98852	0.98807	0.01392	0.01451
11.73	0.98944	0.01516	0.98973	0.98919	0.01488	0.01548
11.74	0.99112	0.01536	0.99144	0.99081	0.01507	0.01566
11.75	0.99241	0.01431	0.9927	0.99213	0.01406	0.01459
11.76	0.99253	0.0123	0.99276	0.99232	0.01206	0.01257
11.77	0.9919	0.01007	0.99204	0.99176	0.00983	0.0103
11.78	0.99114	0.00858	0.99125	0.99103	0.0084	0.00876
11.79	0.99038	0.00783	0.99047	0.99028	0.00767	0.008
11.8	0.98966	0.00747	0.98976	0.98958	0.0073	0.00764
11.81	0.98906	0.00733	0.98915	0.98897	0.00718	0.00749
11.82	0.98857	0.00729	0.98866	0.98849	0.00713	0.00746
11.83	0.98815	0.00728	0.98824	0.98807	0.00711	0.00744
11.84	0.98779	0.00729	0.98788	0.9877	0.00713	0.00745
11.85	0.98747	0.0073	0.98756	0.98739	0.00714	0.00747
11.86	0.98719	0.00732	0.98728	0.9871	0.00716	0.0075
11.87	0.98693	0.00733	0.98702	0.98684	0.00717	0.0075
11.88	0.98668	0.00733	0.98677	0.98658	0.00716	0.0075
11.89	0.98646	0.00735	0.98655	0.98636	0.00718	0.00753
11.9	0.98624	0.00738	0.98634	0.98615	0.00721	0.00756
11.91	0.98604	0.00741	0.98614	0.98595	0.00724	0.00758
11.92	0.98587	0.00744	0.98596	0.98578	0.00727	0.00762
11.93	0.98569	0.00745	0.98579	0.98559	0.00728	0.00764
11.94	0.98552	0.00745	0.98561	0.98543	0.00728	0.00764
11.95	0.98534	0.00745	0.98544	0.98524	0.00728	0.00765
11.96	0.98518	0.00747	0.98527	0.98507	0.00729	0.00764
11.97	0.98501	0.0075	0.98511	0.98491	0.00731	0.00769
11.98	0.98487	0.00756	0.98497	0.98477	0.00738	0.00776
11.99	0.98475	0.00763	0.98484	0.98464	0.00745	0.00782
12.0	0.98465	0.00769	0.98475	0.98455	0.00751	0.00789
12.01	0.98453	0.0077	0.98463	0.98443	0.00752	0.0079
12.02	0.98441	0.00767	0.9845	0.98431	0.0075	0.00786
12.03	0.98425	0.00765	0.98435	0.98415	0.00747	0.00783
12.04	0.98412	0.00768	0.98422	0.98401	0.0075	0.00788
12.05	0.98399	0.00774	0.98409	0.98389	0.00756	0.00793
12.06	0.98389	0.00782	0.98399	0.9838	0.00764	0.00801
12.07	0.98381	0.00787	0.98391	0.98371	0.0077	0.00807
12.08	0.98372	0.00786	0.98382	0.98362	0.00767	0.00805
12.09	0.9836	0.00782	0.9837	0.9835	0.00764	0.008
12.1	0.98345	0.00779	0.98356	0.98335	0.00761	0.00797
12.2	0.98256	0.00882	0.98266	0.98247	0.00865	0.00899
12.3	0.98202	0.00911	0.98211	0.98194	0.00895	0.00927
12.4	0.98122	0.00926	0.98131	0.98113	0.00909	0.00942
12.5	0.98042	0.00915	0.98052	0.98032	0.00897	0.00933
12.6	0.97977	0.00952	0.97987	0.97967	0.00934	0.00972
12.7	0.97914	0.00966	0.97924	0.97902	0.00946	0.00987
12.8	0.97855	0.00995	0.97866	0.97843	0.00973	0.01017
12.9	0.97798	0.0102	0.9781	0.97786	0.00998	0.01042
13.0	0.97744	0.01048	0.97756	0.97732	0.01026	0.01073
13.1	0.97691	0.01076	0.97702	0.97678	0.01052	0.011
13.2	0.97639	0.01106	0.97652	0.97627	0.01081	0.01131
13.3	0.97589	0.01134	0.97601	0.97576	0.01109	0.01161
13.4	0.9754	0.01164	0.97554	0.97526	0.01137	0.01192
13.5	0.97492	0.01193	0.97506	0.97479	0.01165	0.01221
13.6	0.97446	0.01222	0.97461	0.97432	0.01194	0.01251
13.7	0.97401	0.01252	0.97415	0.97387	0.01223	0.01282
13.8	0.97357	0.01282	0.97372	0.97342	0.01252	0.01314
13.9	0.97314	0.01313	0.97329	0.97299	0.01281	0.01345
14.0	0.97271	0.01344	0.97287	0.97256	0.01314	0.01377
14.1	0.97229	0.01374	0.97245	0.97213	0.01342	0.01407
14.2	0.97187	0.01405	0.97204	0.97171	0.01371	0.01439
14.3	0.97146	0.01435	0.97163	0.97129	0.01401	0.01469
14.4	0.97104	0.01465	0.97121	0.97086	0.0143	0.01499
14.5	0.97062	0.01495	0.9708	0.97044	0.0146	0.01532
14.6	0.9702	0.01526	0.97038	0.97002	0.0149	0.01563
14.7	0.96978	0.01557	0.96996	0.9696	0.0152	0.01594
14.8	0.96937	0.01586	0.96956	0.96918	0.01549	0.01625
14.9	0.96896	0.01617	0.96915	0.96876	0.01578	0.01657
15.0	0.96855	0.0165	0.96874	0.96835	0.0161	0.01691
15.5	0.96645	0.01793	0.96665	0.96624	0.01747	0.01836
16.0	0.9644	0.01934	0.96463	0.96417	0.01886	0.01982
16.5	0.96231	0.02091	0.96255	0.96204	0.0204	0.02144
17.0	0.96008	0.02258	0.96035	0.9598	0.02204	0.0231
17.5	0.95777	0.02464	0.95807	0.95746	0.02407	0.02521
18.0	0.95541	0.02664	0.95573	0.95509	0.02597	0.02728
18.5	0.953	0.02841	0.95334	0.95267	0.02767	0.02914
19.0	0.95072	0.03044	0.95109	0.95036	0.02967	0.03121
19.5	0.94851	0.03259	0.94891	0.94811	0.03181	0.03335
20.0	0.94635	0.03497	0.94678	0.94592	0.03418	0.03574
20.5	0.94416	0.03764	0.94461	0.94371	0.03684	0.03847
21.0	0.942	0.04076	0.94248	0.94149	0.03992	0.0416
21.5	0.93996	0.04413	0.94047	0.93944	0.04321	0.04508
22.0	0.9378	0.04683	0.93839	0.93724	0.04578	0.04788
22.5	0.93559	0.04869	0.93622	0.93497	0.04752	0.0499
23.0	0.9336	0.05093	0.93425	0.93296	0.04965	0.05213
23.5	0.93176	0.05341	0.93242	0.93111	0.05218	0.05471
24.0	0.92993	0.05629	0.93063	0.9292	0.05497	0.05757
24.5	0.92812	0.05921	0.9289	0.92741	0.05795	0.06052